ELECTROMIGRATION INDUCED HILLOCK DYNAMICS ON THE INTERCONNECT SURFACE Six Fold Crystal Symmetry, {111} Planes in FCC For 15° tilt angle, the edge hillock transforms into step like wave, which slowly decays off while shifting towards the cathode side. However, at moderate and high electron winds χ≥25 , the step like wave starts to grow steadily, while drifting with constant speed in the windward direction. Eventually, the lower edge of the wave front may touch the opposite edge of the interconnect line, and terminates the process completely (electrical shut down). |
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