ELECTROMIGRATION INDUCED HILLOCK DYNAMICS ON THE INTERCONNECT SURFACE Four Fold Crystal Symmetry, {100} Planes in FCC The four fold crystal symmetry combined with the zero tilt angle may be very
troublesome for the interconnects. In all range of electron wind intensities χ= 5−50 studied in this work, the edge-Hillock converts into a kink-like wave
form, which immediately starts to multiply along the windward direction, especially
at high electron wind intensities. The form of the individual waves are stabilized
due time, by adapting almost perfect sawtooth shape. This spreading wave package
shifts towards the cathode end. For the moderate electron winds, such as χ=25 , the
lee side of the hillock transform into wedge shape intrusion pointing to the
windward direction. This intrusion produces a very large internal void. This giant
size void has very unusual form as illustrated in Figure namely; wedge shapedoublet.
Definitely it causes a fatal break down of the interconnect line, when hits
the opposite edge. |
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