Introduction

Theory

Experimental
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Results

Conclusions

 

 

 

 

 

 

 

 

 

© 2005 CSL

Experimental Setup:

Physical Model Considers the presence of:

Insulators: i.e. substrate, SiO2

Vias: Tugsten  

Shunts: TiAl3 / TiN / etc.


Only the sidewalls and the edges of the interconnect lines are subjected to the surface drift-diffusion.

*Isometric views
*Side view